Product name:Hexachlorodisilane
Purity:99%
Appearance:Colorless liquid
Sample:Available
Storage:below 5° C
CAS No.: 13465-77-5
Hexachlorodisilane Cas 13465-77-5
Typical Properties
Chemical name:Hexachlorodisilane
Cas no:13465-77-5
Synonyms:1,1,1,2,2,2-Hexachlorodisilane;
Molecular weight:268.89
Molecular formula:Cl6Si2
Molecular structure:
| Item | Specification |
| Boiiling point | 144-145.5 °C |
| Density | 1.562 g/mL |
| RI | n20/D 1.475 |
| Fp | 78°C |
Usage
Semiconductor industry: Used as an electronic precursor in chemical vapor deposition (CVD) processes for the deposition of silicon oxide and silicon oxynitride thin films; high-purity grades are employed in advanced wafer manufacturing.
Photovoltaic industry: Used in the preparation of silicon-based thin films.
Organosilicon sector: Serves as a synthetic intermediate for the production of specialty siloxanes and organosilicon resins.
Packaging and Shipping
200kg/drum
According to customer requirments.
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Hexachlorodisilane Cas 13465-77-5